报告题目：The Polymer Chemistry of Photolithography

报告内容简介：

The technology of photolithography and the manufacture of integrated circuits have transformed society, enabling the information revolution and myriad devices that have become indispensable to our daily life. The Whittaker group at The University of Queensland has been working in the field of polymers for photolithography since 2003, primarily in synthesis and evaluation of novel resists, but also in fundamentals of photochemical processes and the physical chemistry of resist materials. In this talk I will present an overview of the development of the field of photolithography leading up to the current leading technologies of EUV and 193 nm immersion lithography. I will discuss the latest trends in the industry with a highlight on the challenges which lie ahead. These challenges are formidable as we start to pattern features onto silicon wafers smaller than 10 nanometres in dimension. Both so-called top-down (traditional lithography) and bottom-up (e.g. directed self-assembly) approaches to patterning will be discussed.

报告人姓名：Prof. Andrew Whittaker

报告人简介(中文)：Prof. Andrew Whittaker is Senior Group Leader within the Australian Institute for Bioengineering and Nanotechnology, at The University of Queensland (UQ). He graduated from UQ with a Ph.D. in 1987, held postdoctoral positions at the University of Science and Technology Languedoc, Montpellier and the Max-Planck Institute for Polymer Research, Mainz, before working for three years at BP Research in Sunbury-on-Thames, U.K. He returned in UQ in 1991, and has developed a large program of work based on polymeric nanosciences. He has been the recipient of many awards, notably in 2015 the Chinese Academy of Sciences President’s International Fellowship, and, on three occasions, High-End Foreign Expert of the PRC. Whittaker has held many leadership positions, and most recently is the immediate Past-President of the Pacific Polymer Federation.

报告人单位：澳大利亚昆士兰大学

报告时间：2023-10-27 13:40

报告地点：腾讯会议室 ID 775 661 656

主办单位：上海大学澳门威尼克斯人网站仿生与智能高分子国际联合实验室

联系人：李文